Why Is (111) Silicon a Better Mechanical Material for Mems ?
نویسندگان
چکیده
In this paper, we explain the mechanical properties of single-crystalline silicon with respect to deflectional and torsional motions. Young's modulus, Poisson’s ratio, and shear modulus are isotropic on silicon (111), whereas the variations on silicon (100) and (110) are quite significant. We newly derive formulae for bulk shear modulus of silicon (100), (110) and (111) and show that bulk shear modulus differs from conventional shear modulus because of the anisotropic characteristics of single-crystal silicon. Furthermore, we show that the bulk shear modulus (which governs torsional motion) varies minimally on silicon (111), with respect to crystallographic directions, as compared to silicon (100) and (110).
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